露光装置:RDiシリーズ
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For mass production of flexible substrates:

  • Flexible circuit boards and touch panels requiring high alignment.
  • Fine pitch flexible printed circuit boards, COF.
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Video

Video

Repeat product videos for related systems

movie-rdi
RDi-10 Duo for Circuit Patterning

RDi-10 Duo for Circuit Patterning

露光装置:RDi-10 Duo
Features:
  • Doubles productivity by supporting 2-way flow (in case of simultaneous exposure of 2 x 250mm widths).
  • High resolution of 10μm.
  • Unique technology enables long circuit patterning in the 20-meter class.
  • The introduction of the new system has already proven its effectiveness in the field, such as "making it possible" to produce high-difficulty products and improving yields.

Two-line stream exposure

 

Substrate: FCCL 250mm wide roll
L/S=15/15μm

 

Substrate: FCCL 250mm wide roll
Etching Circuit Formation. Curve Formation Capability, PAD Matching

RDi-MP/RDi-MP Duo for circuit patterning

RDi-MP/RDi-MP Duo for circuit patterning

 

露光装置:RDi-MP

  

 

露光装置:RDi-MP Duo
Features:
  • FDi optical system for fine patterning is adopted. Equipped with exposure mode switching function (*Refer to FDi).
  • RDi-MP Duo supports 2-roll substrate flow.
RDi-80 for solder resist exposure

RDi-80 for solder resist exposure

露光装置:RDi-80
Features:
  • Equipped with UV lamps as light sources, corresponding to the photosensitive wavelengths of solder resists and photosensitive coverlays
Product specification

Product specification

 Light sourceEffective exposure sizeSubstrate widthResolutionThroughputTotal Overlay Accuracy
RDi-10 Duo Semiconductor laser 635x520mm 250mm wide x 2 lines (500mm wide x 1 line also available) 10μm L/S 38 sec/plane @30mJ MD:500mm 6μm
RDi-MP Semiconductor laser 515x260mm 250mm (*others on request) 4μm L/S 45 sec/plan @55mJ MD: 515mm 3.5μm
RDi-MP Duo Semiconductor laser 515x590mm 250mm width x 2 lines (*others on request) 4μm L/S 44 sec/plane @50mJ MD:500mm 3.5μm
RDiー80 UV lamp 635x520mm 250/500mm 30μm L/S / Φ80μm 58 sec/plane @150mJ 69 sec/plane @200mJ MD:610mm 7μm

 

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