露光装置:EDiシリーズ
bg Edi-series 02
title 01
Solder resist formation:
  • -FC-BGA substrates/FC-CSP substrates
  • -Various module substrates such as AiP
  • -HDI substrates
-Exposure of various other sensitive materials
  • -Photovia, coverlay, etc.
content1
title 01
  • Realizes resist SRO of φ40µm to accommodate miniaturization of package substrates. (EDi-5308)
  • New UV lamp light source with greatly improved light intensity achieves up to 10% higher productivity than conventional models. (EDi-8308)
  • The broadband wavelength of the UV lamp light source enables the use of a wide range of photo sensitive materials.
  • High positional accuracy of 6 µm is achieved with the D-A-T high-precision compensation technology and a new high-precision stage (EDi-5308).
  • Die by Die alignment function solves the die shift problem of FO-PLP (optional function)
  • Supports large substrates up to 25 "X32" (EDi-8310)
 
Video

Video

Repeat product videos for related systems

movie-edi
Exposed sample

Exposed sample

EDi-5308

SRO:Φ40μm

EDi-8308

SROΦ:80μm

Product specification

Product specification

 Light sourceResolutionMaximum exposure sizeTotal Overlay Accuracy
EDi-5308 UV Lamp SRO:Φ40μm 635x535 mm 6μm
EDi-8308 UV Lamp SRO:Φ80μm 635x535 mm 7μm
EDi-8310 UV Lamp SRO:Φ80μm 813x635 mm 7μm

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