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Charge removal and data erasure for flash memory, other non-volatile memory, image sensors, etc.
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Product specification
Product specification
| Model type | VUM-3500 |
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| Wafer size | Φ300 mm (standard) |
| No. of sheets processed at the same time | 15 sheets |
| Cassette form | FOUP |
| Wafer transfer | Automatic transfer |
| Number of lamps | 20 pcs. |
| Intensity Measurement | Automatic measurement |